Monolithic three-dimensional neural probes from deterministic rolling of soft electronics
Cognition and behaviour rely on coordinated activity from neural circuits distributed across three-dimensions. However, typical probes for recording neural activity in the brain are limited to two-dimensional interfacing due to the planar semiconductor fabrication process. Here, we report a rolling-of-soft-electronics approach to create monolithic 3D neural probes with high scalability and design flexibility. Compared to previous stacking or assembly methods, the approach directly transforms a planar device into a 3D probe by leveraging the softness of flexible electrodes. The electrode shanks are initially fabricated in a single plane and then connected to flexible spacer. By varying features of the planar design, such as shank pitch and spacer layer thickness, the device can then be deterministically rolled into several versatile 3D probe designs containing hundreds of electrodes. With the system, we demonstrate single-unit spike recording in rodent and non-human primate models. We also show that the probe can provide microscopy-like 3D spatiotemporal mapping of spike activities in the rodent visual cortex, with five-week-long recording stability and promising 3D decoding performance of visual orientation.
Continuous Biochemical Profiling of the Gastrointestinal Tract Using an Integrated Smart Capsule
The gastrointestinal tract contains a wealth of chemical information that can be used to decipher the health of the digestive and nervous systems. Traditional methods of analysis, such as fecal analysis and biopsies, are invasive, costly, and incapable of providing real-time metabolic and hormone profiling across the gastrointestinal tract. Commercial ingestible capsule sensors have been developed, but only monitor basic markers, such as pH and pressure, neglecting detailed chemical analysis. Here we report an integrated smart capsule that can simultaneously detect a spectrum of biochemical markers, including electrolytes, metabolites, and hormones. The capsule, which is termed PillTrek, is 7 mm in diameter and 25 mm in length, and houses a miniaturized wireless electrochemical workstation capable of executing a range of electrochemical measurement techniques (potentiometry, amperometry, voltammetry, and impedimetry), allowing it to interface with a variety of electrochemical sensors and detect various parameters in the gut. Using an array of sensors (serotonin, glucose, pH, ionic strength, and temperature), we illustrate the capabilities of the system in vitro and in vivo in animal studies involving rat and rabbit models, monitoring the dynamic profile of these crucial biomarkers and their responsiveness to different dietary intakes.
A wearable echomyography system based on a single transducer
Wearable electromyography devices can detect muscular activity for health monitoring and body motion tracking, but this approach is limited by weak and stochastic signals with a low spatial resolution. Alternatively, echomyography can detect muscle movement using ultrasound waves, but typically relies on complex transducer arrays, which are bulky, have high power consumption and can limit user mobility. Here we report a fully integrated wearable echomyography system that consists of a customized single transducer, a wireless circuit for data processing and an on-board battery for power. The system can be attached to the skin and provides accurate long-term wireless monitoring of muscles. To illustrate its capabilities, we use this system to detect the activity of the diaphragm, which allows the recognition of different breathing modes. We also develop a deep learning algorithm to correlate the single-transducer radio-frequency data from forearm muscles with hand gestures to accurately and continuously track 13 hand joints with a mean error of only 7.9°.
Monolithically integrated high-density vertical organic electrochemical transistor arrays and complementary circuits
Organic electrochemical transistors (OECTs) can be used to create biosensors, wearable devices and neuromorphic systems. However, restrictions in the micro- and nanopatterning of organic semiconductors, as well as topological irregularities, often limit their use in monolithically integrated circuits. Here we show that the micropatterning of organic semiconductors by electron-beam exposure can be used to create high-density (up to around 7.2 million OECTs per cm) and mechanically flexible vertical OECT arrays and circuits. The energetic electrons convert the semiconductor exposed area to an electronic insulator while retaining ionic conductivity and topological continuity with the redox-active unexposed areas essential for monolithic integration. The resulting p- and n-type vertical OECT active-matrix arrays exhibit transconductances of 0.08-1.7 S, transient times of less than 100 μs and stable switching properties of more than 100,000 cycles. We also fabricate vertically stacked complementary logic circuits, including NOT, NAND and NOR gates.
A physicochemical-sensing electronic skin for stress response monitoring
Approaches to quantify stress responses typically rely on subjective surveys and questionnaires. Wearable sensors can potentially be used to continuously monitor stress-relevant biomarkers. However, the biological stress response is spread across the nervous, endocrine, and immune systems, and the capabilities of current sensors are not sufficient for condition-specific stress response evaluation. Here we report an electronic skin for stress response assessment that non-invasively monitors three vital signs (pulse waveform, galvanic skin response and skin temperature) and six molecular biomarkers in human sweat (glucose, lactate, uric acid, sodium ions, potassium ions and ammonium). We develop a general approach to prepare electrochemical sensors that relies on analogous composite materials for stabilizing and conserving sensor interfaces. The resulting sensors offer long-term sweat biomarker analysis of over 100 hours with high stability. We show that the electronic skin can provide continuous multimodal physicochemical monitoring over a 24-hour period and during different daily activities. With the help of a machine learning pipeline, we also show that the platform can differentiate three stressors with an accuracy of 98.0%, and quantify psychological stress responses with a confidence level of 98.7%.
An autonomous wearable biosensor powered by a perovskite solar cell
Wearable sweat sensors can potentially be used to continuously and non-invasively monitor physicochemical biomarkers that contain information related to disease diagnostics and fitness tracking. However, the development of such autonomous sensors faces a number of challenges including achieving steady sweat extraction for continuous and prolonged monitoring, and addressing the high power demands of multifunctional and complex analysis. Here we report an autonomous wearable biosensor that is powered by a perovskite solar cell and can provide continuous and non-invasive metabolic monitoring. The device uses a flexible quasi-two-dimensional perovskite solar cell module that provides ample power under outdoor and indoor illumination conditions (power conversion efficiency exceeding 31% under indoor light illumination). We show that the wearable device can continuously collect multimodal physicochemical data - glucose, pH, sodium ions, sweat rate, and skin temperature - across indoor and outdoor physical activities for over 12 hours.
Location-aware ingestible microdevices for wireless monitoring of gastrointestinal dynamics
Localization and tracking of ingestible microdevices in the gastrointestinal (GI) tract is valuable for the diagnosis and treatment of GI disorders. Such systems require a large field-of-view of tracking, high spatiotemporal resolution, wirelessly operated microdevices and a non-obstructive field generator that is safe to use in practical settings. However, the capabilities of current systems remain limited. Here, we report three dimensional (3D) localization and tracking of wireless ingestible microdevices in the GI tract of large animals in real time and with millimetre-scale resolution. This is achieved by generating 3D magnetic field gradients in the GI field-of-view using high-efficiency planar electromagnetic coils that encode each spatial point with a distinct magnetic field magnitude. The field magnitude is measured and transmitted by the miniaturized, low-power and wireless microdevices to decode their location as they travel through the GI tract. This system could be useful for quantitative assessment of the GI transit-time, precision targeting of therapeutic interventions and minimally invasive procedures.
Printable and recyclable carbon electronics using crystalline nanocellulose dielectrics
Electronic waste can lead to the accumulation of environmentally and biologically toxic materials and is a growing global concern. Developments in transient electronics-in which devices are designed to disintegrate after use-have focused on increasing the biocompatibility, whereas efforts to develop methods to recapture and reuse materials have focused on conducting materials, while neglecting other electronic materials. Here, we report all-carbon thin-film transistors made using crystalline nanocellulose as a dielectric, carbon nanotubes as a semiconductor, graphene as a conductor and paper as a substrate. A crystalline nanocellulose ink is developed that is compatible with nanotube and graphene inks and can be written onto a paper substrate using room-temperature aerosol jet printing. The addition of mobile sodium ions to the dielectric improves the thin-film transistor on-current (87 μA mm) and subthreshold swing (132 mV dec), and leads to a faster voltage sweep rate (by around 20 times) than without ions. The devices also exhibit stable performance over six months in ambient conditions and can be controllably decomposed, with the graphene and carbon nanotube inks recaptured for recycling (>95% recapture efficiency) and reprinting of new transistors. We demonstrate the utility of the thin-film transistors by creating a fully printed, paper-based biosensor for lactate sensing.
Strain-resilient electrical functionality in thin-film metal electrodes using two-dimensional interlayers
Flexible electrodes that allow electrical conductance to be maintained during mechanical deformation are required for the development of wearable electronics. However, flexible electrodes based on metal thin-films on elastomeric substrates can suffer from complete and unexpected electrical disconnection after the onset of mechanical fracture across the metal. Here we show that the strain-resilient electrical performance of thin-film metal electrodes under multimodal deformation can be enhanced by using a two-dimensional (2D) interlayer. Insertion of atomically-thin interlayers - graphene, molybdenum disulfide, or hexagonal boron nitride - induce continuous in-plane crack deflection in thin-film metal electrodes. This leads to unique electrical characteristics (termed electrical ductility) in which electrical resistance gradually increases with strain, creating extended regions of stable resistance. Our 2D-interlayer electrodes can maintain a low electrical resistance beyond a strain in which conventional metal electrodes would completely disconnect. We use the approach to create a flexible electroluminescent light emitting device with an augmented strain-resilient electrical functionality and an early-damage diagnosis capability.
Improving stability in two-dimensional transistors with amorphous gate oxides by Fermi-level tuning
Electronic devices based on two-dimensional semiconductors suffer from limited electrical stability because charge carriers originating from the semiconductors interact with defects in the surrounding insulators. In field-effect transistors, the resulting trapped charges can lead to large hysteresis and device drifts, particularly when common amorphous gate oxides (such as silicon or hafnium dioxide) are used, hindering stable circuit operation. Here, we show that device stability in graphene-based field-effect transistors with amorphous gate oxides can be improved by Fermi-level tuning. We deliberately tune the Fermi level of the channel to maximize the energy distance between the charge carriers in the channel and the defect bands in the amorphous aluminium gate oxide. Charge trapping is highly sensitive to the energetic alignment of the Fermi level of the channel with the defect band in the insulator, and thus, our approach minimizes the amount of electrically active border traps without the need to reduce the total number of traps in the insulator.
Gallium nitride multichannel devices with latch-induced sub-60-mV-per-decade subthreshold slopes for radiofrequency applications
Aluminium gallium nitride/gallium nitride (AlGaN/GaN)-based superlattice castellated field-effect transistors are a potential basis for high-power radiofrequency amplifiers and switches in future radars. The reliability of such devices, however, is not well understood. Here we report transistor latching in multichannel GaN transistors. At the latching condition, drain current sharply transits from an off-state value to a high on-state value with a slope less than 60 mV per decade. Current-voltage measurements, simulations and correlated electroluminescent emission at the latching condition indicate that triggering of fin-width-dependent localized impact ionization is responsible for the latching. This localization is attributed to the presence of fin-width variation due to variability in the fabrication process. The latching condition is reversible and non-degrading, and we show that it can lead to improvement in the transconductance characteristics of transistors, implying improved linearity and power in radiofrequency power amplifiers.
Contacting individual graphene nanoribbons using carbon nanotube electrodes
Graphene nanoribbons synthesized using bottom-up approaches can be structured with atomic precision, allowing their physical properties to be precisely controlled. For applications in quantum technology, the manipulation of single charges, spins or photons is required. However, achieving this at the level of single graphene nanoribbons is experimentally challenging due to the difficulty of contacting individual nanoribbons, particularly on-surface synthesized ones. Here we report the contacting and electrical characterization of on-surface synthesized graphene nanoribbons in a multigate device architecture using single-walled carbon nanotubes as the electrodes. The approach relies on the self-aligned nature of both nanotubes, which have diameters as small as 1 nm, and the nanoribbon growth on their respective growth substrates. The resulting nanoribbon-nanotube devices exhibit quantum transport phenomena-including Coulomb blockade, excited states of vibrational origin and Franck-Condon blockade-that indicate the contacting of individual graphene nanoribbons.
Spin injection in graphene using ferromagnetic van der Waals contacts of indium and cobalt
Graphene-based spintronic devices require efficient spin injection, and dielectric tunnel barriers are typically used to facilitate spin injection. However, the direct growth of ultrathin dielectrics on two-dimensional surfaces is challenging and unreliable. Here we report spin injection in graphene lateral spin valves using ferromagnetic van der Waals contacts of indium and cobalt (In-Co), and without the deposition of dielectric tunnel barriers. With this approach, we obtain magnetoresistance values of 1.5% ± 0.5% (spin signal around 50 Ω), which is comparable to state-of-the-art graphene lateral spin valves with oxide tunnel barriers, with a working device yield of more than 70%. By contrast, lateral spin valves with non-van der Waals contacts containing only cobalt are inefficient and exhibit, at best, a magnetoresistance of around 0.2% (spin signal around 3 Ω). The contact resistance of our ferromagnetic indium-cobalt van der Waals contacts is 2-5 kΩ, which makes them compatible with complementary metal-oxide-semiconductor devices.
A smart acoustic textile for health monitoring
Wearable electronics, such as smart textiles, are of potential use in healthcare monitoring, human-machine interfaces and environmental analysis. However, the scalability and reliability of the technology is restricted due to challenges related to rapid material degradation, potential toxicity, high production costs and heavy computational workload. Here we report an acoustic-based smart textile technology. The approach, which we term SonoTextiles, uses piezoelectric transducers that are mounted at both ends of glass microfibres and act as transmitters and receivers of acoustic waves. The flexible glass microfibres act as acoustic waveguides and are embedded into the textile substrate, providing precise sensing by measuring wave propagation and energy loss along the fibre in response to stimuli such as touch and bending. We also use acoustic frequency selectivity and frequency-domain signal processing algorithms to enhance computational efficiency. Our acoustic textile is breathable, durable and stable under thermal fluctuations, and we show that it can be used in distributed tactile sensing, hand gesture recognition and respiratory rate monitoring.
Nanofluidic logic with mechano-ionic memristive switches
Neuromorphic systems are typically based on nanoscale electronic devices, but nature relies on ions for energy-efficient information processing. Nanofluidic memristive devices could thus potentially be used to construct electrolytic computers that mimic the brain down to its basic principles of operation. Here we report a nanofluidic device that is designed for circuit-scale in-memory processing. The device, which is fabricated using a scalable process, combines single-digit nanometric confinement and large entrance asymmetry and operates on the second timescale with a conductance ratio in the range of 9 to 60. In operando optical microscopy shows that the memory capabilities are due to the reversible formation of liquid blisters that modulate the conductance of the device. We use these mechano-ionic memristive switches to assemble logic circuits composed of two interactive devices and an ohmic resistor.
An asynchronous wireless network for capturing event-driven data from large populations of autonomous sensors
Networks of spatially distributed radiofrequency identification sensors could be used to collect data in wearable or implantable biomedical applications. However, the development of scalable networks remains challenging. Here we report a wireless radiofrequency network approach that can capture sparse event-driven data from large populations of spatially distributed autonomous microsensors. We use a spectrally efficient, low-error-rate asynchronous networking concept based on a code-division multiple-access method. We experimentally demonstrate the network performance of several dozen submillimetre-sized silicon microchips and complement this with large-scale in silico simulations. To test the notion that spike-based wireless communication can be matched with downstream sensor population analysis by neuromorphic computing techniques, we use a spiking neural network machine learning model to decode prerecorded open source data from eight thousand spiking neurons in the primate cortex for accurate prediction of hand movement in a cursor control task.
A clean van der Waals interface between the high- dielectric zirconium oxide and two-dimensional molybdenum disulfide
Two-dimensional transition metal dichalcogenide semiconductors possess ideal attributes for meeting industry scaling targets for transistor channel technology. However, the development of scaled field-effect transistors (FETs) requires industry-compatible gate dielectrics with low equivalent oxide thicknesses. Here we show that zirconium oxide (ZrO)-an industry-compatible high-dielectric-constant () oxide-can form a clean interface with two-dimensional molybdenum disulfide (MoS). Photoelectron spectroscopy analysis shows that although silicon dioxide and hafnium oxide substrates introduce the doping of MoS, ZrO exhibits no measurable interactions with MoS. Back-gated monolayer MoS FETs using ZrO as a dielectric exhibit stable and positive threshold voltages of 0.36 V, subthreshold swings of 75 mV dec and ON currents of more than 400 µA. We also use ZrO dielectrics to fabricate p-type tungsten diselenide FETs with ON-state currents of more than 200 µA µm. Atomic-resolution imaging of ZrO deposited on top of MoS reveals a defect-free interface, which leads to top-gated FETs with an equivalent oxide thickness of 0.86 nm and subthreshold swing values of 80 mV dec. The clean interface between ZrO and monolayer MoS allows the effective modulation of threshold voltage in top-gated FETs via gate metal work-function engineering.
Out-of-equilibrium phonons in gated superconducting switches
Recent experiments have suggested that superconductivity in metallic nanowires can be suppressed by the application of modest gate voltages. The source of this gate action has been debated and either attributed to an electric-field effect or to small leakage currents. Here we show that the suppression of superconductivity in titanium nitride nanowires on silicon substrates does not depend on the presence or absence of an electric field at the nanowire, but requires a current of high-energy electrons. The suppression is most efficient when electrons are injected into the nanowire, but similar results are obtained when electrons are passed between two remote electrodes. This is explained by the decay of high-energy electrons into phonons, which propagate through the substrate and affect superconductivity in the nanowire by generating quasiparticles. By studying the switching probability distribution of the nanowire, we also show that high-energy electron emission leads to a much broader phonon energy distribution compared with the case where superconductivity is suppressed by Joule heating near the nanowire.
Quantum paraelectric varactors for radiofrequency measurements at millikelvin temperatures
Radiofrequency reflectometry can provide fast and sensitive electrical read-out of charge and spin qubits in quantum dot devices coupled to resonant circuits. In situ frequency tuning and impedance matching of the resonator circuit using voltage-tunable capacitors (varactors) is needed to optimize read-out sensitivity, but the performance of conventional semiconductor- and ferroelectric-based varactors degrades substantially in the millikelvin temperature range relevant for solid-state quantum devices. Here we show that strontium titanate and potassium tantalate, materials which can exhibit quantum paraelectric behaviour with large field-tunable permittivity at low temperatures, can be used to make varactors with perfect impedance matching and resonator frequency tuning at 6 mK. We characterize the varactors at 6 mK in terms of their capacitance tunability, dissipative losses and magnetic field insensitivity. We use the quantum paraelectric varactors to optimize the radiofrequency read-out of carbon nanotube quantum dot devices, achieving a charge sensitivity of 4.8 μ Hz and a capacitance sensitivity of 0.04 aF Hz.
Imperceptible augmentation of living systems with organic bioelectronic fibres
The functional and sensory augmentation of living structures, such as human skin and plant epidermis, with electronics can be used to create platforms for health management and environmental monitoring. Ideally, such bioelectronic interfaces should not obstruct the inherent sensations and physiological changes of their hosts. The full life cycle of the interfaces should also be designed to minimize their environmental footprint. Here we report imperceptible augmentation of living systems through in situ tethering of organic bioelectronic fibres. Using an orbital spinning technique, substrate-free and open fibre networks-which are based on poly (3,4-ethylenedioxythiophene):polystyrene sulfonate-can be tethered to biological surfaces, including fingertips, chick embryos and plants. We use customizable fibre networks to create on-skin electrodes that can record electrocardiogram and electromyography signals, skin-gated organic electrochemical transistors and augmented touch and plant interfaces. We also show that the fibres can be used to couple prefabricated microelectronics and electronic textiles, and that the fibres can be repaired, upgraded and recycled.
A ferroelectric-memristor memory for both training and inference
Developing artificial intelligence systems that are capable of learning at the edge of a network requires both energy-efficient inference and learning. However, current memory technology cannot provide the necessary combination of high endurance, low programming energy and non-destructive read processes. Here we report a unified memory stack that functions as a memristor as well as a ferroelectric capacitor. Memristors are ideal for inference but have limited endurance and high programming energy; ferroelectric capacitors are ideal for learning, but their destructive read process makes them unsuitable for inference. Our memory stack uses a silicon-doped hafnium oxide and titanium scavenging layer that are integrated into the back end of line of a complementary metal-oxide-semiconductor process. With this approach, we fabricate an 18,432-device hybrid array (consisting of 16,384 ferroelectric capacitors and 2,048 memristors) with on-chip complementary metal-oxide-semiconductor periphery circuits. Each weight is associated with an analogue value stored as conductance levels in the memristors and a high-precision hidden value stored as a signed integer in the ferroelectric capacitors. Weight transfers between the different memory technologies occur without a formal digital-to-analogue converter. We use the array to validate an on-chip learning solution that, without batching, performs competitively with floating-point-precision software models across several benchmarks.
