Microsystems & Nanoengineering

A surface acoustic wave tag utilizing a multilayer structure of SiO/Pt/128°YX-LiNbO for operation at 600 °C
Tang Z, Shi R, Guo D, Luo C, Li H and Han T
This study addresses the issue of traditional surface acoustic wave (SAW) tag failure under high-temperature conditions by proposing a SAW tag based on a multilayer structure of SiO/Pt/128°YX-LiNbO. The structure has been simulated using the finite element method/wave-number domain analysis (FEM/WDA) approach, which reveal the effects of reflector topological parameters on the scattering characteristics of SAWs. Compared with Pt/128°YX-LiNbO, the bulk wave scattering in the multilayer structure is reduced by 50%. In the micro-nanofabrication of the tag, a low-roughness, high-density SiO film is prepared using physical vapor deposition (PVD). Test results indicate that the tag exhibits a temperature coefficient of frequency (TCF) of -32.38 ppm/°C over a wide temperature range of 30-600°C. After undergoing thermal shock at 600 °C for 336 h, the time-domain reflection amplitude decreases by less than 1%, demonstrating that the SiO protective layer effectively suppresses the high-temperature decomposition of LiNbO and reduces the agglomeration rate of Pt electrodes. Experimental results confirm that the proposed high-temperature-resistant SAW tag maintains stable performance under prolonged exposure to 600 °C environments. The tag has been installed on the surface of a steel ladle in a steel plant, demonstrating excellent reliability in a vacuum degassing environment.
Oil-sealed RGD-modified alginate hydrogel microwell array for analysis of single-cell-derived extracellular vesicles and particles
Yamagata C, Hamazaki Y, Nakazato T, Itai S, Honjo M, Kato M, Kurashina Y, Asai M, Hoshino A and Onoe H
We propose an oil-sealed, arginine-glycine-aspartic (RGD) -modified alginate hydrogel microwell array for the analysis of single-cell-derived extracellular vesicles and particles (EVPs) secreted by adherent cells cultured in enclosed spaces. Taking advantage of the mesh structure of alginate hydrogel, we developed a microwell array with size-selective permeability that allows nutrients to pass through the hydrogel while preventing EVPs from doing so. Continuous single-cell culture in sealed microwells (>19 days) has been achieved, while retaining the EVPs inside the microwells. The single-cell-derived EVPs were collected from sealed microwells using a glass capillary to analyze surface membrane proteins. We believe that our oil-sealed RGD-modified alginate hydrogel microwell array will contribute to revealing the heterogeneity of cells, thereby advancing our understanding of the mechanisms of various diseases.
High-throughput chip-calorimeter using a BiTe thermopile heat flux sensor array
Liu Y, Chen Z, Xie Y, Zhang Y, Zhang G, Wang Y and Cheng J
Modern thermoelectric modules have emerged as promising platforms for precision thermal analysis in biological and chemical applications. This study presents a high-throughput microcalorimeter employing a patterned bismuth telluride (BiTe) thermopile array as integrated heat flux sensors, overcoming the throughput limitations of conventional calorimetric systems. Through finite element analysis-guided device optimization, we established that increasing thermocouple height from 0.4 mm to 0.8 mm reduces thermal conductance, achieving around 1 power sensitivity. The system demonstrated dual-mode calibration methods using both the electrical (Joule heating) and the chemical (water-ethanol mixing enthalpy) references. Device functionality was validated through real-time monitoring of Escherichia coli metabolism, revealing distinct thermal signatures upon antibiotic challenge. The antimicrobial susceptibility testing (AST) is performed with 4 commonly used antibiotics. The platform achieved 4 h AST with coherent values to Clinical and Laboratory Standards Institute (CLSI) guidelines for minimum inhibitory concentration (MIC) determination. Notably, the modular chip architecture integrates 8 sensing units as a proof-of-concept, coupled with disposable microfluidic chambers that eliminate cross-contamination risks. This chip-calorimeter implementation establishes a new paradigm for chemical reaction heat measurement and rapid clinical diagnostics of infectious diseases.
Integrated 3D microstructured digital microfluidic platform for advanced 3D cell culture
Chen X, Lin X, Li H and Jia Y
Three-dimensional (3D) cell culture systems better simulate the in vivo microenvironment by promoting intercellular interactions and functional expression, which are crucial for tissue engineering and regenerative medicine. However, conventional two-dimensional (2D) culture platforms fail to mimic the spatial complexity of in vivo tissues, often resulting in altered cellular behavior and limited physiological relevance. In this research, we introduce a 3D cell culture platform based on a digital microfluidic (DMF) system. This platform integrates DMF electrode actuation with 3D-printed microstructure arrays, enabling precise capture and aggregation of cells within a defined 3D scaffold. While cells initially adhere in a 2D structure, they rapidly self-assemble into a 3D cell spheroid on the chip. The platform's capabilities for droplet dispersion, fusion, and movement were validated using the 3D-printed DMF chip. The key parameters, such as applied voltage, microstructure height, and electrode spacing, were systematically investigated for their effects on droplet manipulation. Cell viability and proliferation assays in 24, 48, and 72 hours confirmed that the 3D microstructured scaffolds exhibit excellent biocompatibility and provide a microenvironment favorable for in vivo-like cell growth. Overall, this integrated DMF chip supports robust 3D cell growth and represents a versatile tool for applications in tissue engineering and regenerative medicine.
Controllable-pore porous microneedles for high-speed extraction and biomarker detection of interstitial fluid
Qin B, Park J, Kim SJ and Kim B
Porous microneedles have attracted considerable attention as minimally invasive tools for interstitial fluid sampling and biomarker analyses. However, existing porous microneedle fabrication methods often suffer from low extraction efficiency, primarily because of the inherent trade-off between increasing porosity and maintaining sufficient mechanical strength. Herein, we present a novel approach for fabricating porous microneedles with controllable pore sizes and enhanced extraction performance. Monodisperse polylactic acid microspheres, produced via microfluidic techniques, are thermally bonded to form porous microneedles with interconnected pore networks originating from the connected voids between the microspheres. By precisely adjusting the microsphere diameter, we optimize the pore size to achieve high extraction efficiency while preserving structural integrity. Following surface treatment and bonding parameter optimization, the resulting porous microneedles exhibit sufficient mechanical strength to penetrate human skin and achieve an in vitro extraction rate of 0.95 μL/min per needle-the highest reported to date. Furthermore, porous microneedles are integrated with a colorimetric paper-based sensor for glucose detection, demonstrating a linear correlation between glucose concentration and the colorimetric response of the sensor. This work provides a promising tool for high-speed interstitial fluid extraction and expands the fabrication strategy for porous structures in biosensing applications.
Spheromatrix: a paper-based platform for scalable 3D tumor model generation, cryopreservation, and high-throughput drug assessment
Glia A, Deliorman M, Sukumar P and Qasaimeh MA
Three-dimensional in vitro tumor models are increasingly recognized for their value in preclinical oncology, offering enhanced physiological relevance compared to traditional two-dimensional cultures. These systems improve the reliability of drug response assessment and hold potential for advancing patient-specific treatment strategies. In this work, we introduce the Spheromatrix, a paper-based platform designed to support spheroid formation, long-term preservation, and parallelized drug evaluation. This scalable system maintains the viability, proliferation, and metabolic activity of tumor spheroids across a variety of cancer cell lines, including U87 glioblastoma. Importantly, it supports cryopreservation and subsequent re-culture, potentially enabling the generation of pre-formed, ready-to-use 3D tumor models. Drug testing on U87 spheroids revealed consistent cytotoxic effects of cisplatin and temozolomide (TMZ), both as single agents and in combination, before and after cryostorage. Combined treatment amplified cytotoxic outcomes, indicating a potentiating effect of cisplatin on TMZ-induced cell death. These results position the Spheromatrix as a practical and versatile platform for building 3D tumor model biobanks and addressing critical gaps in current model accessibility and reuse.
A textile-based alignment-free electrophysiological sensing sleeve for comprehensive cardiovascular monitoring
Qiu S, Li Y, Dai C, Wu S, Chen X, Ji N, Fang G, Yam Y, Wang CCL and Zhao N
Continuous monitoring of cardiovascular risk factors in daily life is crucial for disease prevention and management. Current wearable systems, such as photoplethysmography (PPG), ultrasound, and pressure sensors, can capture some of these parameters but require precise sensor alignment over arteries. This alignment dependency complicates daily use and makes the signals highly susceptible to motion artifacts. In this work, we present a textile-based alignment-free electrophysiological sensing sleeve (TAESS) that can be comfortably worn on the upper arm. The TAESS integrates impedance plethysmography (IPG) and electrocardiography (ECG) to enable synchronized cardiovascular haemodynamic monitoring, including blood pressure (BP), cardiac output (CO), systemic vascular resistance (SVR), heart rate (HR), and other metrics. The sleeve is fabricated using silver-based conductive yarns, forming flexible, breathable, and stretchable electrodes that are produced via an automated, low-cost knitting process. Compared to commercial electrodes, TAESS demonstrates superior permeability (37.5 mg·cm·h), stretchability (exceeding 45% in wale direction), and thermal regulation (remaining within 0.4 °C after exercise). Most importantly, it maintains high signal fidelity and is minimally affected by radial movements, outperforming commercial PPG sensors in blood volume detection. The TAESS achieved systolic and diastolic BP prediction root-mean-squared errors of 7.05 mmHg and 5.93 mmHg, respectively, even under respiratory interference and after re-wearing. This scalable, low-cost sensing sleeve offers a robust and alignment-free solution for continuous cardiovascular monitoring, paving the way for personalized healthcare in daily life.
A wireless self-decoupling scheme for multimodal sensing
Wang K, Gao C, Zhu Z, Lai H, Chen G, Zhang H, Wang R, Si J, Yang J, Wang Z, Wang P, Zhang Q, Nie M and Han L
Skin converts multisensory stimuli into bioelectrical signals through cutaneous receptors and then transmits them to the central nervous system (CNS), implementing an analog-digital response to perceive the environment. However, target engagement components that access multisensory stimuli face significant challenges in multimodal interaction, especially the intrinsic decoupling in stretchable heterogeneous integrating systems and the dimensional broadening in traditional human five sensations. In this work, we propose a passive wireless multimodal self-decoupling methodology paradigm to optimize the signal scheduling of systems and broaden the cognitive dimensions of humans, which engages the strategic configuration of symmetrical inductor-capacitor (LC) resonant circuit combined with LC tank to unlock the single-port output self-decoupling sensing, thereby decoding five sensible stimuli to augment situational awareness of human. Systematic theoretical model is established to verify the self-decoupling methodology and the multimodal sensing scheme based on RLC-modulated mechanism. Multiple prototypes of single-port liquid metal (LM)-based wireless multimodal electronic skin implement targeted responses of skin-like receptors. That incorporating pressure (0 kPa~40 kPa), temperature (25 °C ~ 45 °C), humidity (5%RH ~ 90%RH), ultraviolet (0 lm~20 lm) and inclination (30°, 45°, 60°, 90°) through accessing corresponding sensing components. This technique proposal is designed to render a self-decoupling methodology for stretchable wireless multimodal unperturbed platforms and bridge the spatial sensory dimensions in traditional multisensory mechanisms for human-machine interaction.
Fabrication of self-emulsifying lipid microstructure by stiffness-tunable mold for drug delivery applications
Park J, Rovera R, Bertsch A, Zaugg N, Hassoun H, Colomb E, Monge C and Brugger J
Amphiphilic lipid formulations, such as self-emulsifying drug delivery systems, offer advantages for enhancing drug release control and expanding their applicability across various administration routes. By integrating microfabrication techniques with these lipid-based systems, additional functionalities such as controlled drug release can be introduced. This can broaden lipid's potential for advanced biomedical and pharmaceutical applications. However, lipids face major fabrication challenges due to their thermolability, solvent incompatibility, and poor mechanical properties. Here, we present a novel microfabrication route for self-emulsifying lipid drug delivery systems based on thermal imprinting of a stiffness-tunable mold, which stays inflexible during the thermal imprinting step and softens upon swelling for the demolding step. The stiffness tuning process is reversible to some extent through a simple drying process, allowing reuse of the mold. The presented method resolves the issues of mechanical stress and lipid dissolution during the demolding process, enabling the scalable and cost-efficient fabrication of lipid microstructures down to 20 µm resolution and a 5:1 aspect ratio. As a proof-of-concept, we fabricated honeycomb-shaped self-emulsifying drug delivery lipid microstructures on a mucoadhesive film. Lipid microstructure increases the mechanical robustness and accelerates lipid dissolution for sublingual administration of poorly water-soluble drugs. In vivo testing in mouse models confirmed efficient mucosal penetration and submucosal drug accumulation, showing potential as sublingual drug delivery devices.
A high-precision nanoliter droplet dispensing system based on optoelectrowetting with tunable droplet volume
Huang K, Liu Z, Liu Y, Deng L, Jiang L, Yan S, Huang S, Zhang S and Cheng X
The capacity to generate high-precision droplets within Lab-on-a-Chip (LOC) devices is essential for numerous biochemical applications, such as DNA sequencing and drug delivery. In this study, we introduce an optoelectrowetting (OEW)-based droplet manipulation system that utilizes a novel droplet dispensing strategy, enabling precise nanoliter droplet dispensing with tunable droplet volume. The system comprises an OEW microchip, a liquid crystal display (LCD) projector connected to a laptop for generating customized light patterns, and a microscope equipped with a charge-coupled device (CCD) camera mounted above the OEW microchip for real-time observation. Simulations and experiments were conducted to investigate the optimal conditions for high-precision droplet dispensing. The system demonstrated exceptional stability in generating uniform droplets, with a minimum relative error (RE) of 0.45% and coefficient of variation (CV) of 2.49% for dispensing droplets of a volume of 36.52 nL. An experiment was conducted to dispense droplets of varying sizes, demonstrating the system's exceptional capability to generate droplets across a broad size range. The system was further validated through its application in polymerase chain reaction (PCR) amplification, confirming its performance in small-scale biochemical reactions. The results indicate that the proposed OEW droplet dispensing system is highly proficient in generating high-precision small-scale droplets with tunable volume. It also demonstrates its capability for biochemical processing and superior performance in sub-200 nL droplet dispensing compared to conventional pipetting techniques. This advancement holds significant potential for enhancing the performance and efficiency of LOC devices in biochemical research and clinical applications.
Metalens for passive generation of a droplet Bessel beam
Jo Y, Cho H, Kim J, Kim Y, Shin S, Park JC and Kim I
Extending the depth of field (DOF) is essential for large-volume imaging in biological research, particularly in thick tissue environments. Bessel beams and their variants are widely used due to their simplicity and have been successfully applied to in vivo imaging. A recent advancement demonstrated the application of droplet Bessel beams (DBBs) for multi-photon microscopy, enabling functional imaging in live mouse brains. However, DBB generation inevitably requires active phase switching devices such as spatial light modulators, which reduce imaging speed and increase system complexity. This study introduces a droplet Bessel beam metalens (DBBM) that passively generates DBBs without phase switching by employing rectangular meta-atoms for orthogonal polarization modulation and X-shaped meta-atoms for amplitude control. Optical simulations identify optimal DBBM parameters that maximize the point spread function (PSF) aspect ratio while minimizing energy leakage into side lobes. Furthermore, the fabricated DBBM produces PSFs consistent with simulations. Imaging simulations based on three-dimensional confocal images of expansion microscopy-treated organoids demonstrated that the DBBM maintains superior performance even in the presence of aberrations. These findings establish the DBBM as a compact and passive solution for extended DOF imaging without the need for beam-shaping devices. Metalens technology is anticipated to have broad applications in real-time volumetric bioimaging and enable simplified optical system designs.
Sideband injection locking of microwave frequency combs in a superconducting optomechanical circuit
Jeong J, Ryu Y, Jung H and Cha J
Superconducting optomechanical circuits enable frequency mixing of optical and mechanical modes, facilitating the generation of microwave frequency combs. However, such optomechanical combs suffer from frequency fluctuations, requiring their stabilization for applications in precision sensing and signal processing. Here, we investigate the sideband injection locking of microwave frequency combs in a niobium-based superconducting optomechanical circuit. By strongly driving the device with a blue-detuned pump to induce parametric instability and introducing an additional tone near individual comb peaks, we study how the locking range varies with the power, the frequency position, and the sweep direction of the injection tone. The locking responses show interesting features such as injection hysteresis, which cannot be explained by existing models. Numerical simulations of the classical optomechanical equations implementing a cubic mechanical nonlinearity show that the nonlinearity contributes to broadening the locking range. We also characterize the Allan deviations and phase noise of the injection-locked combs for different injection frequencies, demonstrating enhanced stability performance. Our results lay the foundation for the utilization of optomechanical combs for applications in nanomechanical sensing and cryogenic microwave pulse generation.
Microelectrode arrays cultured with in vitro neural networks for motion control tasks: encoding and decoding progress and advances
Hua S, Liu Y, Luo J, Li S, Jiang L, Wu P, Sun S, Shang L, Lu C, Zhang K, Liu J, Wang M, Shi H and Cai X
Microelectrode arrays (MEAs) cultured with in vitro neural networks are gaining prominence in bio-integrated system research, owing to their inherent plasticity and emergent learning behaviors. Here, recent advances in motion control tasks utilizing MEAs-based bio-integrated systems are presented, with a focus on encoding-decoding techniques. The bio-integrated system comprises MEAs integrated with neural networks, a bidirectional communication system, and an actuator. Classical decoding algorithms, such as firing-rate mapping and central firing-rate methods, along with cutting-edge artificial intelligence (AI) approaches, have been examined. These AI methods enhance the accuracy and adaptability of real-time, closed-loop motion control. A comparative analysis indicates that simpler, lower-complexity algorithms suit basic rapid-decision tasks, whereas deeper models exhibit greater potential in more complex temporal signal processing and dynamically changing environments. The review also systematically analyzes the prospects and challenges of bio-integrated systems for motion control. Future prospects suggest that MEAs cultured with in vitro neural networks may leverage their flexibility and low energy consumption to address diverse motion control scenarios, driving cross-disciplinary research at the intersection of neuroscience and artificial intelligence.
Side-viewing axicon-integrated miniature fiber probe for extended depth of focus and ultrahigh lateral resolution endoscopic imaging
Liu Y, Zhang D, Li W, Zheng S, Fan H, Lan T, Hao Q and Huang Y
The early and precise diagnosis of suspected pathological tissues or organs has increasingly embraced the utilization of 3D real-time visualization and discrimination of intricate structures facilitated by miniature optical coherence tomography (OCT) endoscopic probes. Those miniature side-viewing endoscopic fiber probes are indispensable for 3D imaging with small, narrow lumens, eliminating the potential for tissue trauma associated with direct-viewing techniques. Nevertheless, current manufacturing techniques pose limitations on the overall imaging prowess of these miniaturized side-viewing probes, hindering their widespread adoption. To surmount this challenge, an ultra-compact side-viewing OCT fiber-optic endoscopic probe with extended depth of focus (DOF) and high lateral resolution is designed based on the all-fiber composite structure. The quantitative relationship between the imaging performance and the fiber structural parameters has been theoretically analyzed. The imaging performance of the fiber probe can be flexibly tailored by adjusting the geometric parameters of the fiber-optic cascade structure. The applicability and feasibility of fiber probe prototype have been convincingly demonstrated through linear scanning and rotational scanning methodologies. This ultra-compact side-viewing OCT fiber probe's capacity to deliver microscopic structural insights paves the way for minimally invasive applications, expected to advance the frontier of early and precise diagnosis and treatment of suspected lesion tissues.
Heterojunction interface-engineered SnO₂-CuO SAW sensor for room-temperature CO₂ detection with fast response and high selectivity
Jin J, Yang Q, Hu A, Cui B, Xue X, Liang Y, Shi F, Lee K and Wang W
Surface acoustic wave (SAW) sensors demonstrate significant potential in environmental monitoring due to their high sensitivity and fast response capabilities. However, conventional single-component gas-sensitive materials struggle to achieve both wide detection ranges and rapid response simultaneously. This study developed a high-performance composite film through heterostructure engineering to enhance carbon dioxide (CO₂) sensing performance. A bilayer composite gas-sensing functional layer was fabricated by sequentially depositing tin oxide (SnO₂) and copper oxide (CuO) films on a lithium niobate (LiNbO₃) substrate via magnetron sputtering. Experimental results demonstrated that the SnO₂-CuO composite sensor exhibited a CO₂ sensitivity of 11.35 mV/%, representing 4.3-fold and 10.3-fold improvements over pure CuO (2.65 mV/%) and SnO₂ (1.10 mV/%), respectively. The detection range was extended to 0.1-4vol%, with response and recovery times reduced to 9.3 s and 28.9 s at room temperature (25 °C). In addition, the SAW sensor demonstrated excellent repeatability, humidity interference resistance, high selectivity and long-term stability (5.7% signal attenuation over 30 days). Density functional theory (DFT) calculations revealed that the enhanced performance was attributed to heterointerface charge modulation, which increased the adsorption capacity for CO₂ molecules.
Dissolved bubble microneedle patches for co-delivery of hydrophobic and hydrophilic drugs to improve acne vulgaris therapy
Zhang X, Zhao X, Li Y, Zhang W, Chen Y, Jia H, Zhang Z and Zhang CY
Acne vulgaris, a prevalent inflammatory skin disorder, poses significant clinical challenges due to its multifactorial pathogenesis involving Propionibacterium acnes (P. acnes) proliferation and chronic inflammation. Conventional therapies, including topical applications, oral medication, and laser treatments, face limitations in drug penetration, patient compliance, and therapy efficacy. Currently, the combined use of hydrophilic drugs and hydrophobic drugs is a commonly recommended clinical approach. However, conventional formulations severely struggle to effectively deliver and release both therapeutic agents at the affected site. To address these issues, we developed the dissolved bubble microneedle patches (DBMNPs) for the co-delivery of hydrophilic (dipotassium glycyrrhizinate, DPG), hydrophobic (PIONIN) drugs, and alongside salicylic acid (SA) at the same time. The DBMNPs, which were fabricated basing on hyaluronic acid (HA), featured hollow bubble structures to encapsulate lipophilic agents, enabling spatially segregated and temporally controlled drug release. The patches exhibited good mechanical strength, excellent biocompatibility, and potent antimicrobial activity against P. acnes. In vivo studies confirmed their efficacy in treating acne vulgaris, offering a minimally invasive and clinically translatable approach to enhance therapeutic effect while minimizing systemic side effects. This study reports a microneedle platform that successfully addresses the key challenge of co-loading and co-delivering both hydrophilic and hydrophobic drugs, and is expected to be applied in the treatment of other skin diseases.
A three-dimensional bipolar microneedle electrode array with local ground integrated at each sidewall for enhanced focal electric stimulation
Chung SH, Kim C, Kim M, Choi D, Son Y, Roh H, Lee BC, Lee HM, Kim YK, Lee SK, Park JH and Im M
The need for spatially-confined electrical stimulation is growing in biomedical applications, for example intracortical stimulation and retinal implant, for enhancement of stimulating resolution. Local grounding techniques have been widely explored to suppress undesired current spread. However, in conventional microneedle arrays like the Utah array, grounding is typically achieved by assigning neighboring electrodes as ground or employing grounding wall around stimulating electrode, which compromises spatial efficiency. In this work, we introduce, for the first time, a bipolar microneedle electrode array (BMEA) that integrates two electrically-independent electrodes within each three-dimensional microneedle structure. The microtip electrode, located at the apex of the microneedle, delivers electrical stimulation, while the local ground electrode, embedded on the sidewall below the microtip, serves to locally confine the spread of current. COMSOL Multiphysics simulations and ex vivo experiments using isolated mouse retina demonstrated that activating the local ground electrode effectively restricts current diffusion, enabling more focused and localized stimulation. This approach offers a compact and efficient solution for focal electrical stimulation with enhanced spatial resolution, providing a promising platform for advanced neural interfacing systems in various biomedical fields.
Alleviating optical pumping inhomogeneity using a polarization-encoded metasurface in NMR co-magnetometers
Xu Y, Chai Z, Jin M, Wang R, Dai S, Qin J and Li J
In nuclear magnetic resonance (NMR) co-magnetometers, the non-uniform transverse energy distribution of the pumping Gaussian beam can result in substantial optical pumping inhomogeneity and decoherence of atomic spins, which hinder the improvement of the precision and sensitivity of the sensor. One of the most significant recent technological advances for laser beam homogenization is the utilization of the microlens array system. However, the homogenized characteristics of the microlens array system vary with the propagation distance of the pumping light and are not suitable for chip integration, which will affect the sensitivity and compactness of the NMR system. To solve this issue, a metasurface homogenizer is demonstrated for encoding intensity information into the polarization profile of an incident Gaussian beam by combining the geometric phase and Malus' law with the transverse intensity distribution independent of the propagation distance. Compared to Gaussian beam pumping at identical input power, the metasurface homogenizer enhances the measured optical magnetic sensitivity by 23%. The proposed metasurface homogenizer not only realizes the higher precision and sensitivity in NMR co-magnetometers, but also highlights how metasurface-based technologies can contribute to the integrated quantum sensing regime.
Molecular electronic devices based on atomic manufacturing methods
Yao C, Li Y, Zhang H, Wang D, Wang J, Wang X, Li X, Liu J and Hong W
As semiconductor devices approach fundamental physical scaling limits, molecular electronics has emerged as a potential technological paradigm for sustaining Moore's Law through the capabilities of single-molecule-scale functional manipulation and quantum modulation. At the foundational research level, the convergence of atomic-precision fabrication techniques with molecule-electrode interfaces and molecular orbital engineering has enabled the directional construction of electronically functional single-molecule devices, including molecular switches, rectifiers, and field-effect transistors, accompanied by preliminary validations of molecular device array integration. However, molecular electronics confronts multifaceted challenges spanning device-level bottlenecks in precise molecular assembly, accurate quantum charge transport characterizations, and performance reproducibility, coupled with integration-level limitations imposed by conventional two-dimensional planar architectures that fundamentally constrain functional density scaling, rendering the realization of high-density integrated molecular devices with operational logic capabilities exceptionally demanding. To address these critical issues, researchers have developed various device fabrication and characterization techniques in recent years, such as the integration of top-down micro/nano-fabrication technologies with bottom-up atomic manufacturing approaches, which have significantly enhanced the stability of molecular devices and data reproducibility. This review systematically summarizes recent advances in preparation methodologies for molecular electronic devices with high reproducibility and reliability, with prospective emphasis on an integrated architecture strategy combining atomic manufacturing technologies with three-dimensional (3D) integrated manufacturing technologies, offering a potential roadmap to transcend conventional two-dimensional integration paradigms and realize logical computing functionalities in molecular electronic devices.
Flexible humidity sensors for diverse applications
Xiao C, Liu X, Zhao Y, Huang C, Zhou N and Mao H
Flexible humidity sensors, as pivotal sensing components in the Internet of Things and intelligent era, have achieved significant progress in material innovation, fabrication engineering, and application diversification in recent years. This review systematically presents the current research status of flexible humidity sensors, focusing on the influence of novel humidity-sensitive materials(including polymers, metal oxides, carbon-based materials, and two-dimensional materials) on key performance metrics such as sensitivity, response time, and stability. The optimization effects of fabrication technologies such as screen printing, spraying, and deposition on device performance are also analyzed. Furthermore, the innovative applications of flexible humidity sensors in fields including healthcare, smart agriculture, smart homes, and human-machine interaction are elaborated in detail. These applications highlight the sensors' adaptability to diverse environmental requirements and their potential to enable intelligent monitoring and interactive systems. Finally, future technological directions for flexible humidity sensors are proposed from the perspectives of material system innovation, improvement of multi-parameter collaborative sensing performance, and optimization of adaptability to complex environments. The proposed development directions are targeted at achieving higher precision, multifunctionality, and self-powered operation, providing insights and guidance for the research and development of next-generation flexible intelligent sensing devices. By bridging material science, manufacturing engineering, and application engineering, this comprehensive review provides a forward-looking perspective on advancing flexible humidity sensing technologies for emerging intelligent systems.
A multi-functional MEMS resonator for simultaneously dual-mode physical sensing and ppb-level timing
Xu J, Xi J, Wang C, Kraft M, Liu H, Martins RP, Mak PI and Wang Y
The development of multifunctional MEMS resonators has long been constrained by the challenge of integrating high-sensitivity sensing and high-stability frequency referencing into a single compact device. This limitation hinders the realization of advanced microsystems for precision sensing, navigation, and signal processing. This paper reports a novel MEMS resonator tailored for the emerging blue-sideband excitation (BSE) scheme, enabling simultaneous multi-mode actuation within a modest frequency band and inducing intricate nonlinear mode coupling. The device serves as an ideal platform to study BSE-induced mode interactions and amplifies the merits of BSE due to its intrinsic clustered vibration modes around 300 kHz. Featuring a dual-cosine structure, the resonator yields abundant in-plane flexural modes while retaining a capacitive transduction mechanism and the standard SOI manufacturing process. Compared to conventional designs such as clamped-clamped (C-C) beams or double-ended tuning forks (DETF), this device achieves multi-mode operation without requiring MHz frequencies or large spans, making its multi-modal response essential for multi-parameter measurements and multifunctional applications. This work ascertains the device's basic characterizations, including temperature effects, electrostatic perturbation sensitivity, and noise floor, when subjected to the BSE scheme. Notably, some modes exhibit counter-intuitive positive frequency shifts with rising temperatures, enabling stabilization via mode summation. Experimentally, a single mode functions as a sensor with a maximum sensitivity of 39.6 mV/V and a noise floor of 1.9 μV/√Hz (Frequency-mode sensing), while the sum frequency of two modes provides a stable reference with 1.5 ppb at 1000 s (Amplitude-mode sensing). Even under combined temperature and electrostatic disturbances, long-term stability remains around 11.9 ppb at 1000 s. These results demonstrate the dual-mode sensing and referencing capabilities of the proposed resonator, addressing fundamental limitations in current MEMS designs and paving the way for advanced, integrated microsystem applications. The development of multifunctional MEMS resonators has long been constrained by the challenge of integrating high-sensitivity sensing and high-stability frequency referencing into a single compact device. This limitation hinders the realization of advanced microsystems for precision sensing, navigation, and signal processing. This paper reports a novel MEMS resonator tailored for the emerging blue-sideband excitation (BSE) scheme, enabling simultaneous multi-mode actuation within a modest frequency band and inducing intricate nonlinear mode coupling. The device serves as an ideal platform to study BSE-induced mode interactions and amplifies the merits of BSE due to its intrinsic clustered vibration modes around 300 kHz. Featuring a dual-cosine structure, the resonator yields abundant in-plane flexural modes while retaining a capacitive transduction mechanism and the standard SOI manufacturing process. Compared to conventional designs such as clamped-clamped (C-C) beams or double-ended tuning forks (DETF), this device achieves multi-mode operation without requiring MHz frequencies or large spans, making its multi-modal response essential for multi-parameter measurements and multifunctional applications. This work ascertains the device's basic characterizations, including temperature effects, electrostatic perturbation sensitivity, and noise floor, when subjected to the BSE scheme. Notably, some modes exhibit counterintuitive positive frequency shifts with rising temperatures, enabling stabilization via mode summation. Experimentally, a single mode functions as a sensor with a maximum sensitivity of 39.6 mV/V and a noise floor of 1.9 μV/√Hz (Frequency-mode sensing), while the sum frequency of two modes provides a stable reference with 1.5 ppb at 1000 s (Amplitude-mode sensing). Even under combined temperature and electrostatic disturbances, long-term stability remains around 11.9 ppb at 1000 s. These results demonstrate the dual-mode sensing and referencing capabilities of the proposed resonator, addressing fundamental limitations in current MEMS designs and paving the way for advanced, integrated microsystem applications.